Articles citing Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography

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Hutagalung, Sabar D.; Kam, Chung Low ; Darsono, Teguh
Nanoscale patterning by AFM lithography and its application on the fabrication of silicon nanowire devices
Sains Malaysiana, Volume 43, No. 2, 2014
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